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The vacuum chamber is a container that keeps the inside in a vacuum state. The vacuum chamber is made by considering the volume, material and shape.

Stainless steel is the main structural material of the ultra-high vacuum system. Among them, 300 series stainless steel is low carbon steel containing 10%-20% Cr, which has excellent corrosion resistance, low gas release rate, non-magnetic property, good weldability, low electrical conductivity and thermal conductivity, and can work at -270~900 °C. The advantages are widely used in high vacuum and ultra high vacuum systems.

In recent years, in order to reduce the manufacturing cost of the vacuum chamber, the use of cast aluminum alloy to make the cavity has also become popular. In addition, there are many examples of using titanium alloys to make special-purpose vacuum chambers.

In order to reduce the surface area of the inner wall of the chamber, sandblasting or electropolishing is usually used to obtain a flat surface. The cavity of the ultra-high vacuum system is mainly surface treated by electrolytic polishing.